Cylindrical Air Bearings
These bearings often find use among rotating supports such as spindles.
They provide the radial load capacity necessary for most journal-type air
bearings. In addition, this bearing can be used as a bushing-type bearing
where rotational motion is constrained about the axis of travel. Many
semi-conductor handling machines incorporate this type of bearing. Often
referred to as "Z-Theta", this denotes translating motion in the
Z-Axis and rotational motion in the theta direction.
The cylindrical "Z-Theta" bearing shown above is used as a grinding spindle. The tapered nose accommodates the wheel, while the axial motion of 30mm in the Z direction provides oscillation. High grinding accuracy results are achieved by using an air bearing for both axes.
The
assembly shown at right consists of a linear thrust surface, a cylindrical
surface, and a spherical surface. This combination creates the rotor for a
rotating spindle. It is shown here before final polishing.
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