The Zygo Mark
IVxp interferometer with a six inch aperture provides high speed data
acquisition and analysis of flat, spherical, or near spherical optical quality
surfaces. This allows us to effectively control the quality of our air
bearings as well as our diamond machined metal optics. Surfaces are
measured to 0.006 µm accuracy, 0.00006 µm precision and 0.003 µm
repeatability.
The
extensive software suite provides functions of measurement including
Peak-to-Valley, Root-Mean-Square, Zernike Computation, Point Spread and
Modulation Transfer Functions, Encircled Energy, subtraction of third order
aberrations and the generation of contour and isometric plots.