Cylindrical Air Bearings

These bearings often find use among rotating supports such as spindles.  They provide the radial load capacity necessary for most journal-type air bearings.  In addition, this bearing can be used as a bushing-type bearing where rotational motion is constrained about the axis of travel.  Many semi-conductor handling machines incorporate this type of bearing.  Often referred to as "Z-Theta", this denotes translating motion in the Z-Axis and rotational motion in the theta direction.

The cylindrical "Z-Theta" bearing shown above is used as a grinding spindle.  The tapered nose accommodates the wheel, while the axial motion of 30mm in the Z direction provides oscillation.  High grinding accuracy results are achieved by using an air bearing for both axes.

The assembly shown at right consists of a linear thrust surface, a cylindrical surface, and a spherical surface.  This combination creates the rotor for a rotating spindle.  It is shown here before final polishing.

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