The Zygo GPI XPHR interferometer with a six inch aperture provides high resolution high speed data acquisition and analysis of flat, spherical, or near spherical optical quality surfaces. This allows us to effectively control the quality of our air bearings as well as our diamond machined metal optics. Surfaces are measured to 0.006 µm accuracy, 0.00006 µm precision and 0.003 µm repeatability.
The extensive software suite provides functions of measurement including Peak-to-Valley, Root-Mean-Square, Zernike Computation, Point Spread and Modulation Transfer Functions, Encircled Energy, subtraction of third order aberrations and the generation of contour and isometric plots.